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TECHNICAL DETAILS +CRRDR SPS PLENUM BOX WITH MOUNTING BRACKETS FOR SLOT DIFFUSER TYPE SLS L=SLOT LENGTH DIFFUSER SPS: L1= L + 35 SPS L SPS R: L1 = L +17

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slot jekpot The M1 series is an all aluminum 76 mm 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C A SEMI